V.А. Vasilyev, B.V. Tarnizhevskiy, ОJSC “ENIN”
Simplicity of creating half-conductive structure of SEs, low raw material consumption, application of cheap paddings, gaining of solid integral modules during the process of large-scale automatic production, significantly cheapens the process of thin-film (TF) FEM production
Photo-electric module of amorphous silicon (α-Si) is the thin-film SE of the complicated structure. The basis of its technological production process is the layerwise application of correspondent compounds of thin films by different methods.